Micro-machined or microelectromechanical systems (MEMS) are miniaturized devices that can be mass-produced, integrating micromechanisms, microsensors, microactuators, and signal processing and control circuits—sometimes even including peripheral interfaces, communication circuits, and power supplies. These systems are characterized by their small size (ranging from 1μm to 10mm), lightweight design, low energy consumption, and stable performance. Their compact nature makes them ideal for mass production, significantly reducing manufacturing costs. Additionally, they exhibit high resonant frequencies, low inertia, and rapid response times, making them highly efficient. MEMS also represent a high-tech achievement with significant added value, aiming not only to reduce size but also to pioneer new technologies and industries through miniaturization, integration, and the exploration of novel principles and components.
The development of microfabrication technology is closely tied to the advancement of large-scale integrated circuits. As the demand for more complex electronic functions within smaller areas increases, the minimum feature size in circuit patterns becomes a critical factor. Microfabrication involves creating micro-scale components and thin-patterns for the microelectronics industry, primarily based on silicon-based plane and bulk processing techniques. Since the mid-1980s, significant progress has been made in various micromachining processes, such as LIGA, quasi-LIGA, micro-discharge machining, plasma beam machining, electron beam machining, rapid prototyping, and bonding technologies.
MEMS have the potential to perform tasks that traditional electromechanical systems cannot. When combined with electronics, they enable the creation of a wide range of micro-devices that can be produced in high volume at low cost. Their applications span numerous fields, from healthcare to aerospace. It is anticipated that in this century, MEMS will transition from laboratory settings to real-world applications, significantly impacting industries such as agriculture, information technology, environmental monitoring, biomedicine, space exploration, and national defense.
The field of micro-machining is a dynamic and rapidly evolving area, with far-reaching implications for science, technology, and the economy. Its growth supports advancements in multiple disciplines and plays a crucial role in national technological development and defense. The industrial applications of MEMS are vast, offering great potential for innovation and economic growth.
In 1959, Richard Feynman, a Nobel Prize-winning physicist, introduced the concept of micro-mechanics. By 1962, the first micro-silicon pressure sensor was developed, and micro-gears, micro-pumps, and other miniature mechanical components were created. In 1965, Stanford University developed a silicon brain electrode probe, followed by the invention of scanning tunneling microscopes and micro-sensors. In 1987, UC Berkeley introduced a micro-electrostatic motor with a rotor diameter of 60–12 μm, demonstrating the feasibility of using silicon-based fabrication to create movable structures compatible with integrated circuits.
Globally, MEMS has received significant attention from governments, academic institutions, and industries. In the late 1980s, MIT, Berkeley, and others released the "National Small Machinery, Big Opportunity" report, emphasizing the strategic importance of microsystems. The U.S. government allocated $50 million over five years to support research in MEMS, focusing on aerospace, information technology, and microsystems. NASA invested $100 million in the "Discovery Microsatellite," while the National Science Foundation funded MEMS research at universities like MIT and UC Berkeley.
In Japan, the Ministry of International Trade and Industry launched a 10-year, 25-billion-yen project to develop two MEMS prototypes: one for medical use and another for industrial maintenance. European countries, including Germany, France, and Switzerland, have also invested heavily in MEMS research. Germany’s LIGA process has become a key method for fabricating three-dimensional microstructures, while France launched a 70-million-franc project in 1993. The European Union coordinated research through the NEXUS network, involving 46 institutes.
Examples of MEMS include a 5μm-tipped tweezers capable of handling red blood cells, a 7×7×2 mm micro-pump, and a magnetic-field-controlled micro-butterfly. Other innovations include the miniature inertial measurement unit (MIMU) and micro-sensors integrated into silicon chips. MEMS continue to evolve, driving breakthroughs in precision, efficiency, and functionality across multiple industries.
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