The Expert Appraisal Committee led by Wang Yuming, an academician of the Chinese Academy of Engineering, announced this afternoon in Hangzhou Fuyang that China’s magnetic bearing technology has achieved a major breakthrough in R&D. The first domestic magnetic bearing product—“The FS450 molecular pump magnetic bearing based on cross feedback control†, Zhejiang Feixuan Technology Co., Ltd. successfully developed, thus breaking the monopoly of foreign technology in the field of molecular pump applications, making China a country that has magnetic bearing technology products with independent intellectual property rights after a few developed countries such as France, the United States, Canada, and Germany. .
Magnetic bearings, also known as active magnetic bearings, are a new type of high performance bearings with no mechanical contact between the rotor and the stator. It consists of mechanical parts, electronic control systems, sensors and auxiliary bearings. The use of electromagnetic force to suspend the rotor in the space has the advantages of no mechanical wear, low energy consumption, high allowable speed, low noise, long life, and no lubrication medium. Selecting the magnetic bearing as the support of the molecular pump rotor can fundamentally solve the problems caused by the lubrication of the lubricating oil return caused by the traditional bearing lubrication on the vacuum chamber and make the magnetic bearing vacuum molecular pump become the first choice for integrated circuit manufacturing equipment. High vacuum equipment. Magnetic bearings are another revolutionary change in the bearing industry following oil lubrication and gas lubrication, adding high-tech products to traditional industries. This kind of sophisticated mechatronics product has broad prospects in military, aerospace, petrochemical, energy, and other fields in addition to its application in vacuum molecular pumps.
The research and development team headed by Hong Shenping, general manager of Zhejiang Feixuan Technology Co., Ltd., took the lead in research and development of molecular pump magnetic bearings for integrated circuit equipment applications. For the first time, they used a five-degree-of-freedom control magnetic suspension bearing for the molecular pump, and adopted cross-feedback control technology to solve the problem of the gyro effect of the flexible rotor at high rotation speeds and improve the stability of the rotor; The motorized balancing technology effectively reduces the vibration of the rotor.
Magnetic bearings, also known as active magnetic bearings, are a new type of high performance bearings with no mechanical contact between the rotor and the stator. It consists of mechanical parts, electronic control systems, sensors and auxiliary bearings. The use of electromagnetic force to suspend the rotor in the space has the advantages of no mechanical wear, low energy consumption, high allowable speed, low noise, long life, and no lubrication medium. Selecting the magnetic bearing as the support of the molecular pump rotor can fundamentally solve the problems caused by the lubrication of the lubricating oil return caused by the traditional bearing lubrication on the vacuum chamber and make the magnetic bearing vacuum molecular pump become the first choice for integrated circuit manufacturing equipment. High vacuum equipment. Magnetic bearings are another revolutionary change in the bearing industry following oil lubrication and gas lubrication, adding high-tech products to traditional industries. This kind of sophisticated mechatronics product has broad prospects in military, aerospace, petrochemical, energy, and other fields in addition to its application in vacuum molecular pumps.
The research and development team headed by Hong Shenping, general manager of Zhejiang Feixuan Technology Co., Ltd., took the lead in research and development of molecular pump magnetic bearings for integrated circuit equipment applications. For the first time, they used a five-degree-of-freedom control magnetic suspension bearing for the molecular pump, and adopted cross-feedback control technology to solve the problem of the gyro effect of the flexible rotor at high rotation speeds and improve the stability of the rotor; The motorized balancing technology effectively reduces the vibration of the rotor.